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Silicon Nitride Etching: The Process And The Benefits For The
Semiconductor Industry Silicon Nitride Etching: The Process And The Benefits For
The Semiconductor Industry October 1 Ty Sambrailo
Jersey
, 2013 | Author: Dennis Felton | Posted in Education
Acknowledged as one of the most demanding processes in the industry, Silicon Nitride etching requires a thorough knowledge on the chemistry involved as well as the specific requirements. Therefore, learning to understand the principles behind this approach is helpful particularly to those who are in the semiconductor industry.

So, how it is carried out? The process includes the following:

* The required materials are readied for exposure to right temperatures where the goal is to achieve the greatest etch and the best selectivity – this is made possible with the use of phosphoric acid on its highest ratio of water at a given temperature.

* Water addition system installation integration – used to keep ideal amount of water in the wet process system.

* The use of a closed system like Imtec’s Nitride Etch Accubaths for precised control of temperature and the acid concentrations.

*The application of closed refluxing system, combined with a system’s control algorithm Shane Ray
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, helps assure that uniformed conditions are created throughout the bath – the key to achieve a precisely controlled etch rate and the best possible selectivity.

* To help ensure that the liquid and fume do not cross the boundary of the heater area, a particular component that acts as a barrier between the harsh environment and the sealant is used – like the Aquaseal fr om Accubath. This technique helps eliminate the most common failure mode seen on heated wet process tanks.

Silicon Nitride Etching – The industry benefits

There are a number of benefits that the production of Silicon Nitrite films provide more specifically to the semiconductor industry. It helps in various applications, including the following:

* for the production of integrated circuits – a kind of material that plays an important role in many electronic devices found in the market today.

* being used as masking layers for local oxidation of silicon.

* used as electrical insulators which have a comparatively high dielectric constant

In addition to helping the semiconductor industry, Silicon Nitride etching play a significant role in other industries as well such as in automobile wh ere it is applied to engine parts; bearings (e.g. ceramic bearings, which have a good resistance to shocks; and medical industry as it is used in many medical applications such as an alternative to titanium.

Paul Drake has had long years working in a high tech company before venturing on the Internet as a freelance writer. He uses his prior experience to write a wide array of topics including wet process and Silicon Nitride Etching. He also runs his own blog Riley Dixon
Jersey
, which reflects his on the Internet current works.
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